Paper Titles

Fabrication of High-Quality Surfaces on Micro Tools by the ELID Grinding Technique
p.441

Abrasive Micromachining with a Multi-Axes Vibration Tool
p.447

A Study of the Micro Pole Structure Fabrication and Application Technology by Micro End-Milling Process
p.453

A Study on the Micro Machining of Si Wafer Using Surface Chemical Reaction
p.459

An Investigation on the 3D Micromachining Techniques Based on a SPM
p.465

Improvement of Corrosion Resistance and Mechanical Properties of the Biomaterial Ti-6Al-4V Alloy by ELID Grinding
p.473

Micro-Polishing of Complex and Flat Parts Using a Chemical Oil Based ER Fluid
p.477

Development of the Electricity Rust Preventive Machining Method in Surface Grinding
p.483

Smoothing CVD Diamond Films by Wire EDM with High Travelling Speed
p.489

HomeKey Engineering MaterialsKey Engineering Materials Vols. 257-258An Investigation on the 3D Micromachining...

An Investigation on the 3D Micromachining Techniques Based on a SPM

Article Preview

Abstract:

You might also be interested in these eBooks

Advances in Abrasive Technology VI

Info:

Periodical:

Key Engineering Materials (Volumes 257-258)

Pages:

465-472

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.257-258.465

Citation:

Cite this paper

Online since:

February 2004

Authors:

Yong Da Yan, T. Sun, Shen Dong, Ying Chun Liang, K. Cheng

Keywords:

3-D Micro Machining, Precision 3D Stages, Scanning Probe Microscope, SPM

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2004 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation: