Abrasive Micromachining with a Multi-Axes Vibration Tool

Nobuyuki Moronuki; Fusahito Yoshida; Y. Sato; A. Kaneko

doi:10.4028/www.scientific.net/KEM.257-258.447

Paper Titles

Prediction of Material Removal in Polishing Free-Form Surfaces with Fixed Abrasives
p.423

Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control
p.429

A 3D Numerical Study of the Polishing Behavior during an Oxide Chemical Mechanical Planarization Process
p.433

Fabrication of High-Quality Surfaces on Micro Tools by the ELID Grinding Technique
p.441

Abrasive Micromachining with a Multi-Axes Vibration Tool
p.447

A Study of the Micro Pole Structure Fabrication and Application Technology by Micro End-Milling Process
p.453

A Study on the Micro Machining of Si Wafer Using Surface Chemical Reaction
p.459

An Investigation on the 3D Micromachining Techniques Based on a SPM
p.465

Improvement of Corrosion Resistance and Mechanical Properties of the Biomaterial Ti-6Al-4V Alloy by ELID Grinding
p.473

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Abrasive Micromachining with a Multi-Axes Vibration Tool

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Key Engineering Materials (Volumes 257-258)

Pages:

447-452

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.257-258.447

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Online since:

February 2004

Authors:

Nobuyuki Moronuki, Fusahito Yoshida, Y. Sato, A. Kaneko

Keywords:

Abrasive Machining, Micro Machining, Multi-Axis Vibration, Non-Resonant Vibration, Productivity, Surface Roughness (SR)

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