Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control

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Periodical:

Key Engineering Materials (Volumes 257-258)

Edited by:

Thomas Pearce, Yongsheng Gao, Jun'ichi Tamaki and Tsunemoto Kuriyagawa

Pages:

429-432

DOI:

10.4028/www.scientific.net/KEM.257-258.429

Citation:

K. Yoshitomi et al., "Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control", Key Engineering Materials, Vols. 257-258, pp. 429-432, 2004

Online since:

February 2004

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$35.00

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