Effect of Pre-Thin-Surface Grinding on Copper Chemical Mechanical Polishing
p.407
p.407
A Study on the Manufacture of the Next Generation CMP Pad with a Uniform Shape Using the Micro-Molding Method
p.413
p.413
A New Process for Internal Polishing of Cemented Carbide Using a Vibrating Tool with Two-Dimensional Small Motions
p.417
p.417
Prediction of Material Removal in Polishing Free-Form Surfaces with Fixed Abrasives
p.423
p.423
Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control
p.429
p.429
A 3D Numerical Study of the Polishing Behavior during an Oxide Chemical Mechanical Planarization Process
p.433
p.433
Fabrication of High-Quality Surfaces on Micro Tools by the ELID Grinding Technique
p.441
p.441
Abrasive Micromachining with a Multi-Axes Vibration Tool
p.447
p.447
A Study of the Micro Pole Structure Fabrication and Application Technology by Micro End-Milling Process
p.453
p.453
Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control
Abstract:
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Periodical:
Key Engineering Materials (Volumes 257-258)
Pages:
429-432
Citation:
Online since:
February 2004
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Сopyright:
© 2004 Trans Tech Publications Ltd. All Rights Reserved
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