A New Process for Internal Polishing of Cemented Carbide Using a Vibrating Tool with Two-Dimensional Small Motions

C. Yamamoto; I. Nakada; T. Kuboi; Takeo Shinmura

doi:10.4028/www.scientific.net/KEM.257-258.417

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Effect of Pre-Thin-Surface Grinding on Copper Chemical Mechanical Polishing
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A Study on the Manufacture of the Next Generation CMP Pad with a Uniform Shape Using the Micro-Molding Method
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A New Process for Internal Polishing of Cemented Carbide Using a Vibrating Tool with Two-Dimensional Small Motions
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Prediction of Material Removal in Polishing Free-Form Surfaces with Fixed Abrasives
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Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control
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A New Process for Internal Polishing of Cemented Carbide Using a Vibrating Tool with Two-Dimensional Small Motions

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Periodical:

Key Engineering Materials (Volumes 257-258)

Pages:

417-422

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.257-258.417

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Online since:

February 2004

Authors:

C. Yamamoto, I. Nakada, T. Kuboi, Takeo Shinmura

Keywords:

Cemented Carbide, Internal Polishing, Small Vibration, Two-Dimensional Free Movement, Vibrating Tool

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References

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