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Prediction of Material Removal in Polishing Free-Form Surfaces with Fixed Abrasives
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Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control
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A 3D Numerical Study of the Polishing Behavior during an Oxide Chemical Mechanical Planarization Process
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Fabrication of High-Quality Surfaces on Micro Tools by the ELID Grinding Technique
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Abrasive Micromachining with a Multi-Axes Vibration Tool
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A Study of the Micro Pole Structure Fabrication and Application Technology by Micro End-Milling Process
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Fabrication of High-Quality Surfaces on Micro Tools by the ELID Grinding Technique

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Periodical:

Key Engineering Materials (Volumes 257-258)

Pages:

441-446

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.257-258.441

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Online since:

February 2004

Authors:

Kazutoshi Katahira, Hitoshi Ohmori, Yoshihiro Uehara, Y. Watanabe, Wei Min Lin, J. Komotori, M. Mizutani

Keywords:

ELID (ELectrolytic In-Process Dressing) Grinding, Micro Tool, Surface Quality

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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References

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