Paper Titles

Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control
p.429

A 3D Numerical Study of the Polishing Behavior during an Oxide Chemical Mechanical Planarization Process
p.433

Fabrication of High-Quality Surfaces on Micro Tools by the ELID Grinding Technique
p.441

Abrasive Micromachining with a Multi-Axes Vibration Tool
p.447

A Study of the Micro Pole Structure Fabrication and Application Technology by Micro End-Milling Process
p.453

A Study on the Micro Machining of Si Wafer Using Surface Chemical Reaction
p.459

An Investigation on the 3D Micromachining Techniques Based on a SPM
p.465

Improvement of Corrosion Resistance and Mechanical Properties of the Biomaterial Ti-6Al-4V Alloy by ELID Grinding
p.473

Micro-Polishing of Complex and Flat Parts Using a Chemical Oil Based ER Fluid
p.477

HomeKey Engineering MaterialsKey Engineering Materials Vols. 257-258A Study of the Micro Pole Structure Fabrication...

A Study of the Micro Pole Structure Fabrication and Application Technology by Micro End-Milling Process

Article Preview

Abstract:

You might also be interested in these eBooks

Advances in Abrasive Technology VI

Info:

Periodical:

Key Engineering Materials (Volumes 257-258)

Pages:

453-458

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.257-258.453

Citation:

Cite this paper

Online since:

February 2004

Authors:

T. Je, J. Lee, Doo Sun Choi, E. Lee, B. Shin, K. Whang

Keywords:

Cutting Force, Deformation, Finite Element Analysis (FEA), Machining System, Mechanical Micro Fabrication, Micro End Milling, Micro Mold, Micro Part, Micro Pole Structure

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2004 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

[1] Y. Yamagata and T. Higuchi: Three-Dimensional Micro Fabrication by Precision Cutting Technique, JSPE, Vol. 61 (1995), p.1361.

[2] Y. Takeuchi, K. Sawada and T. Sata: Proc. of IEEE Int. Conf. on Robotics and Automation, Nagoya, 1995, p.67.

[3] T. Je, J. Lee, D. Choi, E. Lee and B. Shin: Key Engineering Materials, Vol. 238-239 (2003), p.383.