Nano Mechanical Processing of Silicon by Atomic Force Microscopy

S. Miyake; M. Wang; J. Kim

doi:10.4028/www.scientific.net/KEM.291-292.401

Paper Titles

Investigation of Chemical Mechanical Polishing of GaAs Wafer by the Effect of a Photocatalyst
p.381

Machining Mechanisms of Si Wafers in Mechanochemical Polishing by Soft Abrasives
p.385

Friction Characteristic of Wafer Surface in Chemical Mechanical Polishing
p.389

Corrosion Inhibiting Effect on Copper Chemical Mechanical Planarization (CMP) in Fe(NO₃)₃ Based Slurries
p.395

Nano Mechanical Processing of Silicon by Atomic Force Microscopy
p.401

Application of Nanometer-Scale Processing Technique in High-Density Recording
p.407

Optimization of the Chemical Vapor Deposition Induced Focused Ion Beam
p.413

Thinning Technology of Patterned Silicon Wafer for Micro Pressure Sensor
p.419

Study on the Surface and Subsurface Integrity of Ground Monocrystalline Silicon Wafers
p.425

HomeKey Engineering MaterialsKey Engineering Materials Vols. 291-292Nano Mechanical Processing of Silicon by Atomic...

Nano Mechanical Processing of Silicon by Atomic Force Microscopy

Abstract:

Nanometer-scale protuberance and groove processing was performed on a silicon (Si) surface by diamond tip sliding using atomic force microscopy (AFM). The protuberances of 0-5 nm height were obtained the silicon surface by using the diamond tip of approximately 200 nm radius and the grooves of 0-2 nm depth were processed by the tip of about 50 nm radius. It was observed that both protuberance and groove were produced using the tip of about 100 nm radius. Indentation measurements show the hardness of processed parts was greater than that of unprocessed parts. Potassium hydroxide (KOH) solution etching was performed on the mechanochemically processed sample. The processed areas were prevented from etching due to the formation of a dense oxide layer. This may be because the processed parts were oxidized by tip sliding due to the effect of mechanochemical oxidation.

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Key Engineering Materials (Volumes 291-292)

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401-406

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https://doi.org/10.4028/www.scientific.net/KEM.291-292.401

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August 2005

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S. Miyake, M. Wang, J. Kim

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Atomic Force Microscope (AFM), Diamond Tip, Mechanochemical Processing, Nanoprocessing, Protuberance Processing, Silicon

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