Preparation and Optical Properties of Epitaxial Pb(Mg_1/3Nb_2/3)O₃-PbTiO₃ Thin Film on Si Substrates with Buffer Layer Using Pulsed Laser Deposition

Abstract:

Epitaxial Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) thin films for electrooptic applications were fabricated on a Si substrate using buffer layers. The PMN-PT/SrRuO3/SrTiO3/(La,Sr)CoO3/CeO2 /YSZ/Si hetrostructure was fabricated by pulsed laser deposition. A PMN-PT thin film with a thickness of 2μm was successfully deposited. The optical characteristics of PMN-PT epitaxial film were measured by prism coupling method. The morphology of the PMN-PT films was drastically improved by introducing a mask between the target and substrate during the deposition. The PMN-PT thin film showed a columnar structure, where the width of each column was approximately 180nm. A refractive index of 2.48 with zero bias voltage was obtained for the epitaxial PMN-PT thin film using the prism coupler method.

• Periodical: Key Engineering Materials (Volume 301)
• Pages: 265-268
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.301.265
• Online since: January 2006
• Authors: Naru Nemoto, Naoki Wakiya, Kazuo Shinozaki, Takanori Kiguchi, Keisuke Satoh, Masatoshi Ishii, Masao Kondo, Kazuaki Kurihara, Nobuyasu Mizutani
• Keywords: Buffer Layer, Epitaxial, Optical Property, PLD, PMN-PT, Thin Film

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