Integration of Ceramic Catalyst on Micro-Hotplate of Thermoelectric Hydrogen Sensor

Yeong Soo Choi; Kazuki Tajima; Woosuck Shin; Naoya Sawaguchi; Noriya Izu; Ichiro Matsubara; Norimitsu Murayama

doi:10.4028/www.scientific.net/KEM.301.277

Paper Titles

Barium Titanate Micropatterns Prepared by Electron Beam Lithography and Electrophoretic Deposition
p.247

Dielectric Measurement of BaTiO₃ Powder and Its Statistical Analysis
p.251

Diffusion Behavior at the Interface of (Ba,Sr)TiO₃(BST)/Electrode/Buffer Layer/Si Epitaxial Multi-Layer Thin Film
p.257

Investigation of Domain Structure and Electrical Properties of Monoclinic Epitaxial Zirconia Buffer Layer
p.261

Preparation and Optical Properties of Epitaxial Pb(Mg_1/3Nb_2/3)O₃-PbTiO₃ Thin Film on Si Substrates with Buffer Layer Using Pulsed Laser Deposition
p.265

Chemical Solution Deposition of PZT/Oxide Electrode Thin Film Capacitors with Preferred Orientation on Si Substrate
p.269

Microfabrication of Thermoelectric Hydrogen Sensor Using KOH Solution Etching
p.273

Integration of Ceramic Catalyst on Micro-Hotplate of Thermoelectric Hydrogen Sensor
p.277

Effect of Mn and Co Addition on Electrical Degradation of ZnO Varistors
p.281

HomeKey Engineering MaterialsKey Engineering Materials Vol. 301Integration of Ceramic Catalyst on Micro-Hotplate...

Integration of Ceramic Catalyst on Micro-Hotplate of Thermoelectric Hydrogen Sensor

Abstract:

To integrate the ceramic Pt/alumina catalyst on micro-hotplate of micro-thermoelectric hydrogen sensor (micro-THS), a dispenser technique was used in this study. This micro-THS with the Pt/alumina catalyst is capable of sensing wide range hydrogen concentration of 50 ppm to 3 % at room temperature. For hydrogen/air mixture gas of 50 ppm, voltage signal is measured to be 0.03 mV at room temperature.

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Periodical:

Key Engineering Materials (Volume 301)

Pages:

277-280

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.301.277

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Online since:

January 2006

Authors:

Yeong Soo Choi, Kazuki Tajima, Woosuck Shin, Naoya Sawaguchi, Noriya Izu, Ichiro Matsubara, Norimitsu Murayama

Keywords:

Ceramic Catalyst, DIspenser Technique, Micro-Hotplate, Thermoelectric Hydrogen Sensor

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