Integration of Ceramic Catalyst on Micro-Hotplate of Thermoelectric Hydrogen Sensor
To integrate the ceramic Pt/alumina catalyst on micro-hotplate of micro-thermoelectric hydrogen sensor (micro-THS), a dispenser technique was used in this study. This micro-THS with the Pt/alumina catalyst is capable of sensing wide range hydrogen concentration of 50 ppm to 3 % at room temperature. For hydrogen/air mixture gas of 50 ppm, voltage signal is measured to be 0.03 mV at room temperature.
Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
Y. S. Choi et al., "Integration of Ceramic Catalyst on Micro-Hotplate of Thermoelectric Hydrogen Sensor", Key Engineering Materials, Vol. 301, pp. 277-280, 2006