Abstract: We design and fabricate a novel flexural plate wave (FPW) accelerometer which has
wide working range and improved sensitivity. A bridge as well as a rectangular diaphragm with a
proof mass has been considered for a wave propagation medium to enhance the performance. The
performance improvement is also verified with the bridge structure and the existence of the proof
mass in the simulation results.
Abstract: This paper presents a design and performance evaluation of a valveless micropump
fabricated from polydimethylsiloxane (PDMS) based on molding techniques. A circular lightweight
piezo-composite actuator (LIPCA) was successfully developed for the actuating diaphragm of the
micropump. The LIPCA is a composite actuator designed and fabricated with piezoceramics in
combination with carbon fabric and glass epoxy. Numerical and experimental methods were used to
investigate the performance of the circular LIPCA. The LIPCA was glued to a PDMS membrane to
form the diaphragm of the micropump. The diaphragm has several advantages, such as high
displacement, dome-shaped deformation and geometrically independent actuation profile. The
diaphragm based on a LIPCA 9 mm in diameter produces a deflection of 27 μm at the applied
voltage of ± 200 V and a frequency of 1 Hz. The micropump has a maximum water flow rate of
0.95 ml/min and a maximum backpressure of 3.8 kPa. The merits of the present micropump are low
cost, ease of manufacturing and high level of effectiveness. The proposed LIPCA is proven to be a
promising alternative to the conventional piezoelectric actuator used in micropumps.
Abstract: In this paper, a digital rebalance loop for MEMS gyroscope is designed and its
performance test is performed. First, the system model of MEMS gyroscope is established by
dynamic analysis. Then, the digital rebalance loop is designed using modern control technique. The
performance of the digital rebalance loop is compared with that of conventional PID rebalance loop.
Through frequency response analysis using MATLAB and experiments using a real MEMS
gyroscope and digital controller, which is realized using digital signal processor (DSP), it is
confirmed that the controller improves the performance of the gyroscope.
Abstract: In this paper, the behavior of microparticles subjected to the AC electric fields generated
by planar microelectrode systems is studied. Microelectrodes including interdigitated array,
castellated array, and jagged array are constructed using microfabrication techniques. Micron-sized
latex beads are used to study their movements. Positive and negative dielectrophoresis (DEP) are
studied. In the interdigitated electrodes, particles experiencing n-DEP are levitated stably to certain
heights where the vertical DEP force is balanced by the gravitational force. The levitation heights of
the particles are measured using the consecutively focusing method. The results provide significant
instructions for the dielectrophoretic manipulation and separation of bioparticles.
Abstract: A novel selective metallization process to fabricate the fine conductive line based on
drop-on-demand (DoD) inkjet printing was studied. Direct inkjet printing is an alternative and costeffective
technology for patterning and fabricating objects directly from design or image files
without making masks and patterns. The conductive ink used in this experiment consists of 1 to 50
nm silver particles that are homogeneously suspended in an organic carrier. A piezo-electric inkjet
print head driven by a bipolar voltage signal is used to dispense 20-40μm diameter droplets.
Repeatability of circuitry fabrication is closely related to the formation of steady, satellite-free
droplets. Therefore, the ability to form small and stable droplets with a same size, constant velocity
and the correct flight angle must be taken into consideration for fine and precise conductive lines. In
this study, parameters affecting the pattern formation such as drop formation, drop placement
accuracy and velocity deviation between each nozzle have been investigated. As a result, direct
inkjet patterning systems equipped with several functioning modules and fine metallic patterns have
Abstract: This paper proposes a method of applying Cu nanoparticles on the surface of miniature
specimen for micro-deformation measurement. The microscope image processing system, making and
preparation of Cu nanoparticles are described. Use of the nanoparticles on a miniature specimen to
determine the Young’s modulus is demonstrated through a tensile testing with an image resolution of 0.3
μm/pixel. Comparable well result is shown and discussed.
Abstract: The strength of micro heat exchanger under pressure is studied in this paper. Micro heat
exchanger is made with brazing technology. It is constructed of stainless steel thin plates with micro
channels and in/out port for fluid flow. Micro channels in thin plates are formed by etching and all
parts including thin plates are joined by brazing. The study on the strength under pressure is
performed by structural analysis. For structural analysis, one layer of micro heat exchanger body is
considered. It is composed of thin plate with micro channel and brazing filler which is used to join
thin plates. This paper shows the tendency of stress behavior and gives design guideline of micro
Abstract: This paper presents a droplet-based micro chemical plant with the chemical preparation,
volume-fragmentation reaction and continuous separation of product with quantitative evaluation.
It consists of a cross-channel network to prepare the droplet-based chemicals, a bifurcation channel
to obtain the volume fragmentation of droplet and the pelican mouth separator to extract the
Abstract: Interfacial residual stresses play an important role in the mechanical
properties. In this paper, the interfacial residual stresses of SCI/Epoxy composites
were determined using a novel technique-microphotoelastic method. The thermal
residual stress field was also numerically simulated using a finite element software
MSC.MARC. The difference and the similarities between the experimental results and
the simulation of FEM analysis were discussed and the availability of the method was
Abstract: As advanced ferritic/martensitic heat-resistant steels generally have a complex structure
consisting of several microstructural units (lath, block, packet, and prior austenite grain), it is very
hard to separate the contribution of each microstructural unit (or its each boundary) to the
strengthening mechanism in such steels. Here we explore the role of each microstructural unit in
strengthening of advanced high Cr steel through nanoindentation experiments performed at
different load levels. Nanoindentation results are analyzed by comparing with microstructural
observations and discussed in terms of prevailing descriptions of strengthening mechanism.