Hardness and Elastic Modulus of ZnO Thin Films Fabricated by PLD Method

Han Ki Yoon; Yun Sik Yu

doi:10.4028/www.scientific.net/KEM.353-358.2966

Paper Titles

Low-Temperature Sintering of Nanoscale Silver Paste for Large-Area Joints in Power Electronics Modules
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Fluctuation Mechanism of Mechanical Properties of Electroplated-Copper Thin Films Used for Three Dimensional Electronic Modules
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Threshold Current Density of Electromigration Damage in Angled Polycrystalline Line
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Crack Propagation Behavior at Sn37Pb-Copper Interface in Low Cycle Fatigue
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Hardness and Elastic Modulus of ZnO Thin Films Fabricated by PLD Method
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On Using Discrete Particle Approaches for Simulating the Perforation Process of Concrete Slab by Hard Projectile
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Fractal Characterization of Sealing Surface Topography and Leakage Model of Metallic Gaskets
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Effect of C/Ti Ratio and Al Powder Size on Microstructure and Performance of Al-Ti-C Grain Refiner
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The Analysis to the Correlation between Cooling Medium and Cooling Result of DWTT Specimen
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 353-358Hardness and Elastic Modulus of ZnO Thin Films...

Hardness and Elastic Modulus of ZnO Thin Films Fabricated by PLD Method

Abstract:

ZnO is an n-type semiconductor having a hexagonal wurzite structure. ZnO exhibits good piezoelectric and optical properties, and might be a good candidate for an electroluminescence device like an UV laser diode. Then, these devices are very small, their films are very thin and they are prepared in the limited size and shape, so they are unsuitable for the extensive mechanical testing. In this present work, ZnO thin films are prepared on the glass, GaAs(100), Si(100) and Si(111) substrates at various temperatures by the pulsed laser deposition (PLD) method. ZnO thin films were evaluated by X-ray diffraction (XRD) and mechanical properties such as hardness and elastic modulus were measured through the nano-indenter.

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Periodical:

Key Engineering Materials (Volumes 353-358)

Pages:

2966-2969

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.353-358.2966

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Online since:

September 2007

Authors:

Han Ki Yoon, Yun Sik Yu

Keywords:

Elastic Modulus, Hardness, Nano Indentation Method, Pulsed Laser Deposition (PLD), Substrate Effect, Zinc Oxide (ZnO)

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References

[1] F. K. Shan and Y. S. Yu: Thin Solid Films Vol. 435 (2003), p.174.

Google Scholar

[2] D. C. Look: Materials Science and Engineering B Vol. 80 (2001), p.383.

Google Scholar

[3] Q. P. Wang, D. H. Zhang, Z. Y. Xue and X. J. Zhang: Optical Materials Vol. 26 (2004), p.23.

Google Scholar

[4] Jie Zhao, Lizhong Hu, Zhaoyang Wang, Yu Zhao, Xiuping Liang and Meitian Wang: Applied Surface Science Vol. 229 (2004), p.311.

Google Scholar

[5] E.G. Herbert, G.M. Pharr, W.C. Oliver, B.N. Lucas and J.L. Hay: Thin Solid Films Vol. 398-399 (2001), p.331.

DOI: 10.1016/s0040-6090(01)01439-0

Google Scholar

[6] J. H. Han: Journal of the KSME Vol. 42 No. 11 (2002), p.48.

Google Scholar

[7] B. D. Cullity: 2nd edition, Addison-Wesley Pub Co (1978).

Google Scholar

[8] I. Ozen, M. A. Gulgun and Meric Ozcan: Key Engineering Material Vol. 264-268 (2004), p.1225 Glass GaAs(100) Si(111) Si(100).

Google Scholar

[20] [40] [60] [80] 100 120 140 160 180 Elastic modulus (GPa) Substrate Applied Load 1g 10g G lass GaAs(100) Si(111) Si(100).

Google Scholar

[2] [4] [6] [8] [10] [12] Hardness (GPa) Substrate Applied Load 1g 10g (A) (B) Glass GaAs(100) Si(111) Si(100).

Google Scholar

[20] [40] [60] [80] 100 120 140 160 180 Elastic modulus (GPa) Substrate Applied Load 1g 10g G lass GaAs(100) Si(111) Si(100).

Google Scholar

[2] [4] [6] [8] [10] [12] Hardness (GPa) Substrate Applied Load 1g 10g Glass GaAs(100) Si(111) Si(100).

Google Scholar

[20] [40] [60] [80] 100 120 140 160 180 Elastic modulus (GPa) Substrate Applied Load 1g 10g G lass GaAs(100) Si(111) Si(100).

Google Scholar

[2] [4] [6] [8] [10] [12] Hardness (GPa) Substrate Applied Load 1g 10g (A) (B) Fig. 5. Mechanical properties such as elastic modulus (A) and hardness (B) of different substrate on applied load 1g, 10g.

Google Scholar