Fabrication of a Pendulous Resonant Micro-Machined Biosensor for Direct Liquid Detection

Gang Huang; Yu Xin Li; Li Qian; Qi Li

doi:10.4028/www.scientific.net/KEM.645-646.1267

Paper Titles

Corrosion Behavior of SAMs Modified Silver-Coated 316LSS as PEMFC Bipolar Plates
p.1233

Stabilization of Pickering Emulsions by Bacterial Cellulose Nanofibrils
p.1247

Enrichment Efficiency Optimization of Dielectrophoresis Cell Chip Based on Interdigitated Microelectrodes Array
p.1255

Functionalization of Mesoporous SBA-15 with APTES by Co-Condensation and its Effect on Immobilization of Candida rugosa Lipase
p.1261

Fabrication of a Pendulous Resonant Micro-Machined Biosensor for Direct Liquid Detection
p.1267

In Situ Synthesis of the Hollow Silica Microspheres with Porous Surface by Using Chemical Modified Pollen Grains as Biotemplate
p.1273

CMOS Amplifier for Neural Signal Recording Applications
p.1279

Analysis and Simulation of a Planar Microelectrode Structure for Dielectrophoretic Manipulation of a Single Cell and Cell Cluster
p.1285

A Biological 3D Printer for the Preparation of Tissue Engineering Micro-Channel Scaffold
p.1290

HomeKey Engineering MaterialsKey Engineering Materials Vols. 645-646Fabrication of a Pendulous Resonant Micro-Machined...

Fabrication of a Pendulous Resonant Micro-Machined Biosensor for Direct Liquid Detection

Abstract:

This paper presents a pendulous resonant MEMS biosensor for liquid detection based on SOI-MEMS technology. The biosensor consists of two electromagnetically driven and sensed resonant paddles working in the torsional mode. The differential output consisted by the two paddles provides the sensor reading. 1um thick SiNx is deposited on the electrodes by plasma enhanced chemical vapor deposition (PECVD), making the biosensor capable of working in liquid directly. In device fabrication, SOI-MEMS fabrication processes were utilized, where a new modified buffered hydrofluoric acid (BHF) solution was used to remove the buried oxide layer and release the paddles. High-current drive circuit and energy compensation circuit are designed to improve the Q-factor of the paddle in liquid. Experimental experiments show that the biosensor can distinguish the density of some liquid effectively．

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 645-646)

Pages:

1267-1272

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.645-646.1267

Citation:

Cite this paper

Online since:

May 2015

Authors:

Gang Huang*, Yu Xin Li, Li Qian, Qi Li

Keywords:

Direct Liquid Detection, Pendulous Resonant MEMS Biosensor, Resonant Paddle, SOI-MEMS

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

* - Corresponding Author

References

[1] L. B. Sharos, A. Raman, S. Crittenden, R. Reifenberger, Enhanced mass sensing using torsional and lateral resonances in microcantilevers, Applied Physics Letters. 84(2004) 4638-4640.

DOI: 10.1063/1.1759379

Google Scholar

[2] C. Vancura, Y. Li, J. Lichtenberg, K. Kirstein, A. Hierlemann, Liquid-phase chemical and biochemical detection using fully integrated magnetically actuated complementary metal oxide semiconductor resonant cantilever sensor systems, Analytical Chemistry. 79(2007).

DOI: 10.1021/ac061795g

Google Scholar

[3] Sader, John E., Larson, Ian, Mulvaney, Paul White, Lee R., Method for the calibration of atomic force microscope cantilevers, Review of Scientific Instruments. 66(1995) 3789-3798.

DOI: 10.1063/1.1145439

Google Scholar

[4] F.M. Battiston et al, A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout, Sensors and Actuators, B 77 (2001)122-131.

DOI: 10.1016/s0925-4005(01)00683-9

Google Scholar

[5] V.L. Vaganov, Construction Problems in Sensors, Sensors and Actuators. A28 (1991)161–172.

Google Scholar

[6] US Lindholm, DD Kana, WH Chu and HN Abramson, Elastic vibration characteristics of cantilever plates in water, Journal of Ship Research. 9 (1965) 11–22.

DOI: 10.5957/jsr.1965.9.2.11

Google Scholar