Collection of Silicone Nanoparticles in Ingot Growing Process and Analysis of Particle Characteristics

Abstract:

This study was conducted to investigate the characteristics of silicon nanoparticles using waste vapors generated from a single-crystal silicon ingot growth furnace and to study their potential applications. The silicon vapors generated in the silicon ingot growth furnace were collected in the form of nanoparticles, and SEM, EDS, BET and XRD analyzes were performed to analyze the characteristics of the collected particles. The particles were in the form of agglomerated nanoparticles with a specific surface area of ​​176 m2 / g and were amorphous SiOx particles with low crystallinity. In the future, we plan to study the application fields of the collected nanoparticles.

• Periodical: Key Engineering Materials (Volume 777)
• Pages: 145-149
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.777.145
• Online since: August 2018
• Authors: Junghyun Kim, Jiho Ahn, Hee Yong Kang, Gyo Woo Lee*
• Keywords: Ingot Growth Process, Particle Characterization, Particle Collection, Silicon Nanoparticles

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