Printed PZT Thick Films Implemented for Functionalized Gas Sensors

Abstract:

Attractive for MEMS, PZT thick films are often microstructured on Si supporting platforms to span the gap between ceramics and thin film technologies. Printing process might lead to lower cost than ceramic process to open routes for MEMS applications. In this paper processing by screen-printing of Au/PZT/Au thick-films supported on alumina or completely released from the substrate are described. Investigations of the film microstructures nevertheless show lower densification than those of bulk ceramics. Prior to selective coating deposition, routes to improve the reduction of the film’s porosity are proposed.

• Periodical: Key Engineering Materials (Volume 777)
• Pages: 158-162
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.777.158
• Online since: August 2018
• Authors: Maria Isabel Rua-Taborda, Onuma Santawitee, Angkana Phongphut, Bralee Chayasombat, Chanchana Thanachayanont, Seeroong Prichanont, Catherine Elissalde, Jérome Bernard, Helene Debeda*
• Keywords: MEMS, Mesoporous Silica, PZT, Sacrificial Layer, Screen-Printing, Sensor, Thick Film

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