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Investigation of the Lattice Defects in P Ion Implanted Silicon
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Evolution of Defect Structures around Te Implanted in GaAs during Solid Phase Epitaxial Regrowth
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As-Implanted Lattice Sites of Dopants in Semiconductors
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Defect Structures in Ion-Implanted InSb
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Defects and Optically Active Transition and Rare Earth Elements in III-V and II-VI Semiconductors and Diamond
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HomeMaterials Science ForumMaterials Science Forum Vols. 10-12As-Implanted Lattice Sites of Dopants in...

As-Implanted Lattice Sites of Dopants in Semiconductors

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Defects in Semiconductors 14

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Periodical:

Materials Science Forum (Volumes 10-12)

Pages:

1183-1188

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.10-12.1183

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Online since:

January 1986

Authors:

H. Hofsäss, G. Lindner, S. Winter, B. Besold, E. Recknagel, G. Weyer, J.W. Petersen

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© 1986 Trans Tech Publications Ltd. All Rights Reserved

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