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HomeMaterials Science ForumMaterials Science Forum Vols. 10-12Enhanced Oxygen Diffusion in Silicon at Low...

Enhanced Oxygen Diffusion in Silicon at Low Temperatures

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Defects in Semiconductors 14

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Periodical:

Materials Science Forum (Volumes 10-12)

Pages:

887-892

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.10-12.887

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Online since:

January 1986

Authors:

A.K. Tipping, R.C. Newman, D.C. Newton, J.H. Tucker

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© 1986 Trans Tech Publications Ltd. All Rights Reserved

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