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HomeMaterials Science ForumMaterials Science Forum Vols. 117-118Effect of External Pressure and Internal Stress on...

Effect of External Pressure and Internal Stress on Imyurity Diffusion in Silicon

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Shallow Impurities in Semiconductors V

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Periodical:

Materials Science Forum (Volumes 117-118)

Pages:

75-80

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.117-118.75

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Cite this paper

Online since:

January 1993

Authors:

O. Sugino, Atsushi Oshiyama

Keywords:

Impurity Diffusion, Pressure

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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