Effect of External Pressure and Internal Stress on Imyurity Diffusion in Silicon

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Periodical:

Materials Science Forum (Volumes 117-118)

Edited by:

Tsunemasa Taguchi

Pages:

75-80

DOI:

10.4028/www.scientific.net/MSF.117-118.75

Citation:

O. Sugino and A. Oshiyama, "Effect of External Pressure and Internal Stress on Imyurity Diffusion in Silicon ", Materials Science Forum, Vols. 117-118, pp. 75-80, 1993

Online since:

January 1993

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$35.00

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