Rapid Thermal Annealing of Ion Implanted Strained Si1-xGex

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 143-147)

Edited by:

Helmut Heinrich and Wolfgang Jantsch

Pages:

513-518

DOI:

10.4028/www.scientific.net/MSF.143-147.513

Citation:

E.V. Thomsen et al., "Rapid Thermal Annealing of Ion Implanted Strained Si1-xGex", Materials Science Forum, Vols. 143-147, pp. 513-518, 1994

Online since:

October 1993

Export:

Price:

$35.00

In order to see related information, you need to Login.