Rapid Thermal Annealing of Ion Implanted Strained Si1-xGex

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Periodical:

Materials Science Forum (Volumes 143-147)

Edited by:

Helmut Heinrich and Wolfgang Jantsch

Pages:

513-518

Citation:

E.V. Thomsen et al., "Rapid Thermal Annealing of Ion Implanted Strained Si1-xGex", Materials Science Forum, Vols. 143-147, pp. 513-518, 1994

Online since:

October 1993

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