Defect Characterization in P Isotype Si/SiGe/Si Heterostructures by Space Charge Spectroscopy

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Periodical:

Materials Science Forum (Volumes 143-147)

Edited by:

Helmut Heinrich and Wolfgang Jantsch

Pages:

495-500

DOI:

10.4028/www.scientific.net/MSF.143-147.495

Citation:

G. Bremond et al., "Defect Characterization in P Isotype Si/SiGe/Si Heterostructures by Space Charge Spectroscopy", Materials Science Forum, Vols. 143-147, pp. 495-500, 1994

Online since:

October 1993

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$35.00

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