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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Photoluminescence of Ring-Distribution of Oxygen...

Photoluminescence of Ring-Distribution of Oxygen Precipitates in Czochralski Silicon

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1129-1134

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1129

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Online since:

November 1995

Authors:

K. Terashima, T. Ikarashi, Haruhiko Ono, Michio Tajima

Keywords:

Dislocation, Oxygen Precipitates, Photoluminescence (PL), Silicon

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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