Relation between Minute Lattice Strain and Anomalous Oxygen Precipitation in a Czochralski-Grown Silicon Crystal

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Periodical:

Materials Science Forum (Volumes 196-201)

Edited by:

M. Suezawa and H. Katayama-Yoshida

Pages:

1743-1748

DOI:

10.4028/www.scientific.net/MSF.196-201.1743

Citation:

S. Kimura et al., "Relation between Minute Lattice Strain and Anomalous Oxygen Precipitation in a Czochralski-Grown Silicon Crystal", Materials Science Forum, Vols. 196-201, pp. 1743-1748, 1995

Online since:

November 1995

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