Lattice Defects in High Quality As-Grown CZ Silicon, Studied with Ligth Scattering and Preferential Etching Techniques

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Periodical:

Materials Science Forum (Volumes 196-201)

Edited by:

M. Suezawa and H. Katayama-Yoshida

Pages:

1755-1760

DOI:

10.4028/www.scientific.net/MSF.196-201.1755

Citation:

J. Vanhellemont et al., "Lattice Defects in High Quality As-Grown CZ Silicon, Studied with Ligth Scattering and Preferential Etching Techniques", Materials Science Forum, Vols. 196-201, pp. 1755-1760, 1995

Online since:

November 1995

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$35.00

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