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HomeMaterials Science ForumMaterials Science Forum Vols. 258-263Silicon Surface Defects: The Roles of Passivation...

Silicon Surface Defects: The Roles of Passivation and Surface Contamination

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Defects in Semiconductors 19

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Periodical:

Materials Science Forum (Volumes 258-263)

Pages:

1719-1724

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.258-263.1719

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Online since:

December 1997

Authors:

Anand J. Reddy, Tracey A. Burr, Julia K. Chan, Gerd J. Norga, Jürgen Michel, Lionel C. Kimerling

Keywords:

Dangling Bond, Lifetime, Native Oxidation, Passivation, Surface Defect

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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