Silicon Surface Defects: The Roles of Passivation and Surface Contamination

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Periodical:

Materials Science Forum (Volumes 258-263)

Edited by:

Gordon Davies and Maria Helena Nazaré

Pages:

1719-1724

DOI:

10.4028/www.scientific.net/MSF.258-263.1719

Citation:

A. J. Reddy et al., "Silicon Surface Defects: The Roles of Passivation and Surface Contamination", Materials Science Forum, Vols. 258-263, pp. 1719-1724, 1997

Online since:

December 1997

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$35.00

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