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HomeMaterials Science ForumMaterials Science Forum Vols. 258-263Precipitation of Iron in FZ and CZ Silicon

Precipitation of Iron in FZ and CZ Silicon

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Defects in Semiconductors 19

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Periodical:

Materials Science Forum (Volumes 258-263)

Pages:

449-454

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.258-263.449

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Online since:

December 1997

Authors:

H. Hieslmair, Andrei A. Istratov, Scott A. McHugo, C. Flink, Eicke R. Weber

Keywords:

Ham's Law, Iron, Precipitation

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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