Copper in Silicon: Quantitative Analysis of Internal and Proximity Gettering

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Periodical:

Materials Science Forum (Volumes 258-263)

Edited by:

Gordon Davies and Maria Helena Nazaré

Pages:

461-466

DOI:

10.4028/www.scientific.net/MSF.258-263.461

Citation:

S. A. McHugo et al., "Copper in Silicon: Quantitative Analysis of Internal and Proximity Gettering", Materials Science Forum, Vols. 258-263, pp. 461-466, 1997

Online since:

December 1997

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$35.00

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