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HomeMaterials Science ForumMaterials Science Forum Vols. 258-263Iron in p-Type Silicon: A Comprehensive Model

Iron in p-Type Silicon: A Comprehensive Model

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Defects in Semiconductors 19

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Periodical:

Materials Science Forum (Volumes 258-263)

Pages:

429-436

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.258-263.429

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Online since:

December 1997

Authors:

Song Zhao, Aimée L. Smith, Sang H. Ahn, Gerd J. Norga, Marlene T. Platero

Keywords:

Fe-Acceptor Pairs, Gettering, Precipitation, Silicon Processing, Solubility

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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