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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Photoluminescence and Backscattering...

Photoluminescence and Backscattering Characterization of 6H SiC Implanted with Erbium and Oxygen Ions

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

501-504

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.501

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Online since:

February 1998

Authors:

A. Kozanecki, C. Jeynes, Brian J. Sealy, W. Jantsch, S. Lanzerstorfer, W. Heiß, G. Prechtl

Keywords:

Erbium Centres, Ion Implantation, Photoluminescence (PL), RBS

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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