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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Influence of Plasma Conditions on the Deposition...

Influence of Plasma Conditions on the Deposition of Superhard Amorphous Carbon Films by Laser and Arc Methods

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

381-382

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.381

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Online since:

August 1998

Authors:

Bernd Schultrich, F.-C. Meyer, H.-J. Scheibe, Th. Witke, H. Ziegele

Keywords:

Arc Deposition, Laser Deposition, Plasma Conditions, Superhard Amorphous Carbon Films

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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