Influence of Plasma Conditions on the Deposition of Superhard Amorphous Carbon Films by Laser and Arc Methods

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

381-382

Citation:

B. Schultrich et al., "Influence of Plasma Conditions on the Deposition of Superhard Amorphous Carbon Films by Laser and Arc Methods", Materials Science Forum, Vols. 287-288, pp. 381-382, 1998

Online since:

August 1998

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