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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Study of the Growth Mechanisms and Properties of...

Study of the Growth Mechanisms and Properties of (Cr,O,N) Films Deposited by Vacuum Arc Evaporation

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

393-396

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.393

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Online since:

August 1998

Authors:

C. Gautier-Picard, J. Machet

Keywords:

(Cr,O,N) Ternary Compounds, Deposition Process, Vacuum Arc Evaporation

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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