Deposition and Characterization of Metal Containing Amorphous Hydrocarbon Films (Me-C:H) Prepared by DC Magnetron Sputtering

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

383-388

DOI:

10.4028/www.scientific.net/MSF.287-288.383

Citation:

C. Specht et al., "Deposition and Characterization of Metal Containing Amorphous Hydrocarbon Films (Me-C:H) Prepared by DC Magnetron Sputtering", Materials Science Forum, Vols. 287-288, pp. 383-388, 1998

Online since:

August 1998

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$35.00

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