Paper Titles

Solid Solution Cd_xZn_1-xS Thin Films Grown by Atomic Layer Epitaxy and Successive Ionic Layer Adsorption and Reaction Techniques
p.367

High Rates of Diamond Deposition with Various Crystals Sizes by Combustion Flame Method
p.373

Tribological Behaviour of Diamond Coatings Obtained by Combustion Flame Process
p.377

Influence of Plasma Conditions on the Deposition of Superhard Amorphous Carbon Films by Laser and Arc Methods
p.381

Deposition and Characterization of Metal Containing Amorphous Hydrocarbon Films (Me-C:H) Prepared by DC Magnetron Sputtering
p.383

Correlation between Deposition Rate and Hardness of Remote PECVD Silicon Oxide Films
p.389

Study of the Growth Mechanisms and Properties of (Cr,O,N) Films Deposited by Vacuum Arc Evaporation
p.393

Measurements of the Loss Probability of Nitrogen Atoms versus Temperature on Aluminium
p.397

Theoretical Investigations of the Multitarget Reactive Sputtering Process: Application to the Titanium - Chromium - Oxygen System
p.401

HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Deposition and Characterization of Metal...

Deposition and Characterization of Metal Containing Amorphous Hydrocarbon Films (Me-C:H) Prepared by DC Magnetron Sputtering

Article Preview

Abstract:

You might also be interested in these eBooks

Trends and New Applications of Thin Films

Info:

Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

383-388

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.383

Citation:

Cite this paper

Online since:

August 1998

Authors:

C. Specht, J. Schroeder, R. Wittorf, M. Grischke, K. Bewilogua

Keywords:

Carbon Based Coatings, DC Magnetron Sputtering, Friction, Wear Resistance

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 1998 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation: