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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Theoretical Investigations of the Multitarget...

Theoretical Investigations of the Multitarget Reactive Sputtering Process: Application to the Titanium - Chromium - Oxygen System

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

401-406

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.401

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Online since:

August 1998

Authors:

N. Martin, Christophe Rousselot

Keywords:

Instability, Multitarget, Oxide Multilayers, Reactive Sputtering

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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