Theoretical Investigations of the Multitarget Reactive Sputtering Process: Application to the Titanium - Chromium - Oxygen System

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

401-406

DOI:

10.4028/www.scientific.net/MSF.287-288.401

Citation:

N. Martin and C. Rousselot, "Theoretical Investigations of the Multitarget Reactive Sputtering Process: Application to the Titanium - Chromium - Oxygen System", Materials Science Forum, Vols. 287-288, pp. 401-406, 1998

Online since:

August 1998

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$38.00

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