The Development of Resistive Heating for the High Temperature Growth of α-SiC using a Vertical CVD Reactor

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Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

157-160

Citation:

E. Eshun et al., "The Development of Resistive Heating for the High Temperature Growth of α-SiC using a Vertical CVD Reactor", Materials Science Forum, Vols. 338-342, pp. 157-160, 2000

Online since:

May 2000

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$38.00

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