Damage-Free Surface Modification of Hexagonal Silicon Carbide Wafers

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

845-848

DOI:

10.4028/www.scientific.net/MSF.338-342.845

Citation:

T.C. Chandler, Jr. et al., "Damage-Free Surface Modification of Hexagonal Silicon Carbide Wafers", Materials Science Forum, Vols. 338-342, pp. 845-848, 2000

Online since:

May 2000

Export:

Price:

$35.00

In order to see related information, you need to Login.