High Temperature 10 Bar Pressure Sensor Based on 3C-SiC/SOI for Turbine Control Applications

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 353-356)

Edited by:

G. Pensl, D. Stephani and M. Hundhausen

Pages:

753-756

DOI:

10.4028/www.scientific.net/MSF.353-356.753

Citation:

S. Zappe et al., "High Temperature 10 Bar Pressure Sensor Based on 3C-SiC/SOI for Turbine Control Applications", Materials Science Forum, Vols. 353-356, pp. 753-756, 2001

Online since:

January 2001

Export:

Price:

$35.00

In order to see related information, you need to Login.