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HomeMaterials Science ForumMaterials Science Forum Vols. 353-356High Temperature 10 Bar Pressure Sensor Based on...

High Temperature 10 Bar Pressure Sensor Based on 3C-SiC/SOI for Turbine Control Applications

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Silicon Carbide and Related Materials 2000

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Periodical:

Materials Science Forum (Volumes 353-356)

Pages:

753-756

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.353-356.753

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Online since:

January 2001

Authors:

S. Zappe, J. Franklin, E. Obermeier, M. Eickhoff, H. Möller, G. Krötz, C. Rougeot, O. Lefort, J. Stoemenos

Keywords:

3C-SiC/SOI, High-Temperature, Pressure Sensor

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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