High Temperature 10 Bar Pressure Sensor Based on 3C-SiC/SOI for Turbine Control Applications

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Periodical:

Materials Science Forum (Volumes 353-356)

Edited by:

G. Pensl, D. Stephani and M. Hundhausen

Pages:

753-756

Citation:

S. Zappe et al., "High Temperature 10 Bar Pressure Sensor Based on 3C-SiC/SOI for Turbine Control Applications", Materials Science Forum, Vols. 353-356, pp. 753-756, 2001

Online since:

January 2001

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