Identification of Microdefects Induced in Si after Hydrogen and Helium Plasma Treatments

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Periodical:

Materials Science Forum (Volumes 38-41)

Edited by:

G. Ferenczi

Pages:

1033-1038

DOI:

10.4028/www.scientific.net/MSF.38-41.1033

Citation:

M. Singh et al., "Identification of Microdefects Induced in Si after Hydrogen and Helium Plasma Treatments", Materials Science Forum, Vols. 38-41, pp. 1033-1038, 1989

Online since:

January 1991

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