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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393The Deep Boron Level in High-Voltage PiN Diodes

The Deep Boron Level in High-Voltage PiN Diodes

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

1309-1312

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.1309

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Online since:

April 2002

Authors:

W. Stadler, Anders Hallén, John Österman, Uwe Zimmermann, Bengt Gunnar Svensson

Keywords:

Deep Boron Level, D-Level, SiC PiN Diode, Transient Enhanced Diffusion TED

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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