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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393A Novel Technology for the Formation of a Very...

A Novel Technology for the Formation of a Very Small Bevel Angle for Edge Termination

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

1305-1308

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.1305

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Online since:

April 2002

Authors:

Feng Yan, C. Qin, Jian Hui Zhao, M. Weiner

Keywords:

Avalanche Breakdown, Edge Termination, Inductively Coupled Plasma, Positive Bevel

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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