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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Development of a Multilayer SiC Surface...

Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

755-758

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.755

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Online since:

April 2002

Authors:

Xiao Yan Song, Srihari Rajgopal, J.M. Melzak, Christian A. Zorman, Mehran Mehregany

Keywords:

APCVD, Low-Pressure CVD, Micro-Electromechanical System (MEMS), Micromolding, Poly-SiC, Surface Micromachining

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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