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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Annealing of Implanted Layers in (1-100) and...

Annealing of Implanted Layers in (1-100) and (11-20) Oriented SiC

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

773-778

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.773

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Online since:

April 2002

Authors:

Masataka Satoh

Keywords:

(1-100) Plane, (11-20) Plane, Implantation, Solid-Phase Regrowth

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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