Phosphorus Ion Implantation into 4H-SiC (0001) and (11-20)

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Periodical:

Materials Science Forum (Volumes 389-393)

Edited by:

S. Yoshida, S. Nishino, H. Harima and T. Kimoto

Pages:

783-786

DOI:

10.4028/www.scientific.net/MSF.389-393.783

Citation:

Y. Negoro et al., "Phosphorus Ion Implantation into 4H-SiC (0001) and (11-20)", Materials Science Forum, Vols. 389-393, pp. 783-786, 2002

Online since:

April 2002

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$35.00

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