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HomeMaterials Science ForumMaterials Science Forum Vols. 433-436Comparison between Ar and N2 for High-Temperature...

Comparison between Ar and N₂ for High-Temperature Treatment of 4H-SiC Substrates

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Silicon Carbide and Related Materials - 2002

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Periodical:

Materials Science Forum (Volumes 433-436)

Pages:

119-124

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.433-436.119

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Online since:

September 2003

Authors:

Ghassan Younes, Gabriel Ferro, Christophe Jacquier, Jacques Dazord, Yves Monteil

Keywords:

High Temperature Treatment, Nitrogen, Surface Morphology, Thermodynamic Calculations

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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