Experiment and Modeling of the Large-Area Etching and Growth Rate of Epitaxial SiC

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Periodical:

Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

141-144

DOI:

10.4028/www.scientific.net/MSF.433-436.141

Citation:

J. Mezière et al., "Experiment and Modeling of the Large-Area Etching and Growth Rate of Epitaxial SiC", Materials Science Forum, Vols. 433-436, pp. 141-144, 2003

Online since:

September 2003

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$35.00

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