Structural Characterization of Thin 3C-SiC Films Annealed by the Flash Lamp Process

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

351-354

DOI:

10.4028/www.scientific.net/MSF.457-460.351

Citation:

E. K. Polychroniadis et al., "Structural Characterization of Thin 3C-SiC Films Annealed by the Flash Lamp Process", Materials Science Forum, Vols. 457-460, pp. 351-354, 2004

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June 2004

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