Micromachining of Novel SiC on Si Structures for Device and Sensor Applications
In this paper the multifariousness of SiC/Si heterostructures for device and sensor applications will be demonstrated. 3C-SiC based microelectromechanical resonator beams (MEMS) with different geometries actuated by the magnetomotive effect operating under ambient conditions were fabricated. The resonant frequency reaches values up to 2 MHz. The applications of these resonators are the measurement of the viscosity of liquids or mass detection. Furthermore, photonic devices in the form of SiC/Si infrared gratings for wavelength and polarization filters in infrared spectra are processed. SiC wear protection for a dosing system with the possibility to dose nano- or picoliter droplets of water based liquids as well as SiC nanomasking for catalytic agent nanostructures are demonstrated.
Robert P. Devaty, David J. Larkin and Stephen E. Saddow
C. Förster et al., "Micromachining of Novel SiC on Si Structures for Device and Sensor Applications", Materials Science Forum, Vols. 527-529, pp. 1111-1114, 2006