Micromachining of Novel SiC on Si Structures for Device and Sensor Applications

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In this paper the multifariousness of SiC/Si heterostructures for device and sensor applications will be demonstrated. 3C-SiC based microelectromechanical resonator beams (MEMS) with different geometries actuated by the magnetomotive effect operating under ambient conditions were fabricated. The resonant frequency reaches values up to 2 MHz. The applications of these resonators are the measurement of the viscosity of liquids or mass detection. Furthermore, photonic devices in the form of SiC/Si infrared gratings for wavelength and polarization filters in infrared spectra are processed. SiC wear protection for a dosing system with the possibility to dose nano- or picoliter droplets of water based liquids as well as SiC nanomasking for catalytic agent nanostructures are demonstrated.

Info:

Periodical:

Materials Science Forum (Volumes 527-529)

Edited by:

Robert P. Devaty, David J. Larkin and Stephen E. Saddow

Pages:

1111-1114

DOI:

10.4028/www.scientific.net/MSF.527-529.1111

Citation:

C. Förster et al., "Micromachining of Novel SiC on Si Structures for Device and Sensor Applications", Materials Science Forum, Vols. 527-529, pp. 1111-1114, 2006

Online since:

October 2006

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$35.00

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