Micromachining of Novel SiC on Si Structures for Device and Sensor Applications

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In this paper the multifariousness of SiC/Si heterostructures for device and sensor applications will be demonstrated. 3C-SiC based microelectromechanical resonator beams (MEMS) with different geometries actuated by the magnetomotive effect operating under ambient conditions were fabricated. The resonant frequency reaches values up to 2 MHz. The applications of these resonators are the measurement of the viscosity of liquids or mass detection. Furthermore, photonic devices in the form of SiC/Si infrared gratings for wavelength and polarization filters in infrared spectra are processed. SiC wear protection for a dosing system with the possibility to dose nano- or picoliter droplets of water based liquids as well as SiC nanomasking for catalytic agent nanostructures are demonstrated.

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Periodical:

Materials Science Forum (Volumes 527-529)

Edited by:

Robert P. Devaty, David J. Larkin and Stephen E. Saddow

Pages:

1111-1114

Citation:

C. Förster et al., "Micromachining of Novel SiC on Si Structures for Device and Sensor Applications", Materials Science Forum, Vols. 527-529, pp. 1111-1114, 2006

Online since:

October 2006

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$38.00

[1] C.W. Liu and J.C. Sturm: J. Appl. Phys. Vol. 82 (1997), p.4558.

[2] A.N. Cleland: Foundation of Nanomechanics: From Solid-State Theory to Device Applications (Springer, Germany, 2003).

[3] Ch. Foerster, V. Cimalla, O. Ambacher and J. Pezoldt: Mater. Sci. Forum Vol. 483-485 (2005), p.201.

[4] Ch. Foerster, V. Cimalla, R. Kosiba, G. Ecke, P. Weih, O. Ambacher and J. Pezoldt: Mater. Sci. Forum Vol. 457-460 (2004), p.821.

DOI: https://doi.org/10.4028/www.scientific.net/msf.457-460.821

[5] K.L. Ekinci, X.M.H. Huang and M.L. Roukes: Appl. Phys. Lett. Vol. 84 (2004), p.4469.

[6] X.M.H. Huang, C.A. Zorman, M. Mehregany and M.L. Roukes: Nature Vol. 421 (2003), p.496.

[7] Ch. Foerster, V. Cimalla, K. Brueckner, V. Lebedev, R. Stephan, M. Hein and O. Ambacher: phys. stat. sol. (a) 202 (2005), p.671.

DOI: https://doi.org/10.1002/pssa.200460471

[8] C. Rockstuhl, H.P. Herzig, Ch. Foerster, A. Leycuras, O. Ambacher and J. Pezoldt: Mater. Sci. Forum Vol. 483-485 (2005).

[8] .