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HomeMaterials Science ForumMaterials Science Forum Vols. 527-529Laser Direct Write Doping and Metallization...

Laser Direct Write Doping and Metallization Fabrication of Silicon Carbide PIN Diodes

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Silicon Carbide and Related Materials 2005

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Periodical:

Materials Science Forum (Volumes 527-529)

Pages:

823-826

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.527-529.823

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Online since:

October 2006

Authors:

Z. Tian, N.R. Quick, Aravinda Kar

Keywords:

Laser Direct Metallization, Laser Doping, PiN Diode

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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Citation:

[1] Z. Tian, N.R. Quick, and A. Kar: ICALEO 2004.

[2] Z. Tian, N.R. Quick, and A. Kar: J. Electron. Mater. Vol. 34 (2005), p.430.

[3] Z. Tian, N.R. Quick, and A. Kar, Materials Research Society Symposium, (2005).

[4] I.A. Salama, Ph.D. dissertation, University of Central Florida, Spring 2003.

[5] R. Singh, K.G. Irvine, D.C. Capell, J.T. Richmond, D. Berning, A.R. Hefner and J.W. Palmour: IEEE Transactions on Electron Devices, Vol. 49 (2002), p.2308.

DOI: 10.1109/ted.2002.805576

[6] Y. Sugawara, D. Takayama, K. Asano, R. Singh, J. Palmour and T. Hayashi: Procedings of 2001 International Symposium on Power Semiconductor Devices & ICs, Osaka, p.27.

DOI: 10.1109/ispsd.2002.1016171

[7] K. Fujihira, S. Tamura, T. Kimoto and H. Matsunami: IEEE Transactions on Electron Devices, Vol. 49 (2002), p.150.

[8] P. Alexandrov, K. Tone, Y. Luo, J.H. Zhao, T. Burke, M. Pan and M. Weiner: Electronics Letters, Vol. 37 (2001), p.531.