Laser Direct Write Doping and Metallization Fabrication of Silicon Carbide PIN Diodes

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Periodical:

Materials Science Forum (Volumes 527-529)

Edited by:

Robert P. Devaty, David J. Larkin and Stephen E. Saddow

Pages:

823-826

DOI:

10.4028/www.scientific.net/MSF.527-529.823

Citation:

Z. Tian et al., "Laser Direct Write Doping and Metallization Fabrication of Silicon Carbide PIN Diodes", Materials Science Forum, Vols. 527-529, pp. 823-826, 2006

Online since:

October 2006

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$35.00

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[6] Y. Sugawara, D. Takayama, K. Asano, R. Singh, J. Palmour and T. Hayashi: Procedings of 2001 International Symposium on Power Semiconductor Devices & ICs, Osaka, p.27.

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