A new series of ReBiO3 (RBO, Re=Y, Sm or other lanthanide) layers have been prepared on single crystal LaAlO3 or SrTiO3 respectively by a low-cost chemical solution deposition (CSD) method, and their structures have been investigated. With deferent Re element, the ReBiO3 phase has a similar cubic lattice with the pseudo-cubic lattice parameter a’ of about 3.81~3.94Å, which is closely matched to that of the ReBa2Cu3Ox (RBCO). In addition, these ReBiO3 phase are stable when they are sintered on 750~1050°C. After annealed below 850°C in air, highly c-axis oriented ReBiO3 layers can be formed on the (100) plane of single crystal LaAlO3 or SrTiO3. Observed under SEM, these layers appear very dense, smooth, pinhole-free and crack-free morphology. With the matched lattice parameter, lower annealing temperature, good grain-orientation and smooth surface, ReBiO3 layers should be candidates for the buffer layers of RBCO coated conductor. As a proof, a superconducting layer of YBCO has been deposited also by a CSD approach on one of these layers and show good texture and expected superconductivity.