Creep deformation mechanism of the steels with a different matrix, α (ferrite), α’ (martensite) and γ (austenite), and precipitates such as MX and M23C6 has been analyzed using positron annihilation lifetime measurement. The positron annihilation lifetime has been found to be a very useful tool for evaluating the characteristic creep damage of the steels with different microstructure and the corresponding microstructural evolution during creep deformation. The creep deformation process of the α steel is heterogeneous, while the α’+M23C6 steel exhibits gradual changes in the creep rate in both transient and acceleration creep regions with the largest off-set strain, implying the homogeneous creep deformation. The α’+M23C6+ MX steel is in between the α and α’+M23C6 steels. The homogeneous creep deformation takes place in the γ steel.