Optical and Microstructural Investigations of Porous Silicon Coated with a-Si:H Using PECVD Technique

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Abstract:

In the present work, the spectroscopic ellipsometry (1.5 - 5.5 eV) was used to investigate the effects of current density induced microstructural variations and their influence on the electronic states of as-prepared and a-Si:H coated porous silicon (PS). The pseudodielectric responses of the low and high current densities (5 and 40 mA/cm2) were analyzed using a multilayer model within the effective medium approximation. The FTIR investigation reveals the enhancement of surface oxide (Si-Ox) layer with current density and the improvement of the Si-Hx band after a-Si:H coating.

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Periodical:

Materials Science Forum (Volumes 587-588)

Pages:

308-312

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Online since:

June 2008

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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