Micro-hotplate platforms, including the heating and sensing resistors, are fabricated by surface micromachining techniques from nitrogen-doped, polycrystalline SiC films deposited by low-pressure chemical vapor deposition. The resulting heated elements are operated without the need for metal electrodes. For comparison, platinum is also used as the heating/sensing resistor on top of otherwise similar SiC micro-hotplates. After characterizing the fundamental thermal transient response of the resulting micro-hotplates, accelerated aging tests are carried out by increasing the input power until the heating resistors fail. Material-related kinetic degradation analysis is conducted to estimate the life time of such elements as infrared emitters.