An Examination of Material-Related Performance in SiC Heated Elements for IR Emitter and Sensor Applications

Abstract:

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Micro-hotplate platforms, including the heating and sensing resistors, are fabricated by surface micromachining techniques from nitrogen-doped, polycrystalline SiC films deposited by low-pressure chemical vapor deposition. The resulting heated elements are operated without the need for metal electrodes. For comparison, platinum is also used as the heating/sensing resistor on top of otherwise similar SiC micro-hotplates. After characterizing the fundamental thermal transient response of the resulting micro-hotplates, accelerated aging tests are carried out by increasing the input power until the heating resistors fail. Material-related kinetic degradation analysis is conducted to estimate the life time of such elements as infrared emitters.

Info:

Periodical:

Materials Science Forum (Volumes 600-603)

Edited by:

Akira Suzuki, Hajime Okumura, Tsunenobu Kimoto, Takashi Fuyuki, Kenji Fukuda and Shin-ichi Nishizawa

Pages:

863-866

DOI:

10.4028/www.scientific.net/MSF.600-603.863

Citation:

L. Chen and M. Mehregany, "An Examination of Material-Related Performance in SiC Heated Elements for IR Emitter and Sensor Applications ", Materials Science Forum, Vols. 600-603, pp. 863-866, 2009

Online since:

September 2008

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Price:

$35.00

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