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HomeMaterials Science ForumMaterials Science Forum Vols. 600-603Femtosecond Laser-Induced Surface Patterning on...

Femtosecond Laser-Induced Surface Patterning on 4H-SiC

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Silicon Carbide and Related Materials 2007

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Periodical:

Materials Science Forum (Volumes 600-603)

Pages:

879-882

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.600-603.879

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Online since:

September 2008

Authors:

Takuro Tomita, Ryota Kumai, Keita Kinoshita, Shigeki Matsuo, Shuichi Hashimoto, Hirokazu Nagase, Makoto Nakajima, T. Suemoto

Keywords:

Femtosecond Laser, Micro Machining, Periodic Structure, Ripple, Surface Pattering

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© 2009 Trans Tech Publications Ltd. All Rights Reserved

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